Metadata
Title
APh/EE 109
Category
courses
UUID
9f0a9c35795741e79c04fe017b5c8e0c
Source URL
https://aph.caltech.edu/academics/courses/aphee-109
Parent URL
https://aph.caltech.edu/academics/courses
Crawl Time
2026-03-23T05:19:27+00:00
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APh/EE 109

Source: https://aph.caltech.edu/academics/courses/aphee-109 Parent: https://aph.caltech.edu/academics/courses

APh/EE 109\

Introduction to the Micro/Nanofabrication Lab

9 units (0-6-3)  | first, second, third terms

Introduction to techniques of micro-and nanofabrication, including solid-state, optical, and microfluidic devices. Students will be trained to use fabrication and characterization equipment available in the applied physics micro- and nanofabrication lab. Topics include Schottky diodes, MOS capacitors, light-emitting diodes, microlenses, microfluidic valves and pumps, atomic force microscopy, scanning electron microscopy, and electron-beam writing.

Instructor: Staff